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Dow Chemical Advanced Technology Center
Project Information
- Project Location:
- Marlborough, MA
- Status:
- Completed
- Structure Type:
- Laboratory
References
- Architect:
- Woodbrier Associates
Scope Of Work
JM Coull was selected by Dow to construct the company's new state-of-the-art 64,000 sf, three-story microelectronics R&D facility in Marlborough. The Advanced Technology Center (ATC) provides space to conduct a variety of research, including work with anti-reflective coatings, lithography, and EUV and e-beam technologies. The facility is instrumental in the company's microelectronic, circuit board, and packaging and finishing operations.
Project Features
64,000 sf total
Eight scanning electron microscope rooms
5,000 sf ISO 4 "ballroom" cleanroom on waffle slab with mechanical equipment mezzanine above and process basement below
Stringent noise, vibration, temperature, and humidity control requirements
Modular cleanroom design for future expansion
Project Images
