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Octopus PECVD Tool Installation
Project Information
- Project Location:
- Tempe, AZ
- Status:
- Completed
- Structure Type:
- Laboratory
References
- Owner:
- Arizona State University
Scope Of Work
This project consisted of two parts, the first to build an addition to a Laser Lab allowing users to move out of the existing space, and the second, to remodel that lab into a Class 100 cleanroom. This new clean room houses the Octopus Tool, a PECVD (Plasma Etched Chemical Vapor) deposition tool that is instrumental in the process used to deposit thin films from a gas state to a solid state, used in this case in the research and development of solar panels. The tool required extensive expansion to a number of lethal gases from the sub-fab area to the researcher’s Lab which was performed by Brycon’s in-house high purity process piping division.
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